C type Magnetic fluid vacuum sealing parts for CVD
Application for magnetic fluid seal
- wafer growing equipment
- semiconductor process equipment(Epitaxy,diffusion,CVD,PVD,implantation ect)
- LCD process equipment Solar cell Vacuum Robot
———The principle of Magnetic sealing
A frroluid can behave as a liquid 0-ring where a rotating shaft enters either a low- or high-pressure chamber. The ferrofluid is held in place bypermanent magnets and forms a tight seal, eliminating most of the friction produced in a traditional mechanical seal .
——— Equipment show
We have three-coordinate measuring laboratory, can carry out all kinds of precision testing, to ensure product quality
We have high precision CNC to ensure the quality and precision of products
———Equipment list
| Name | Type | Quantity | Processing range | Precision(um) |
| CNC | MAZAK(QTN350L) | 1 | φ720*1250 | 3 |
| CNC | MAZAK(QTN250L) | 1 | φ580*1500 | 3 |
| Turn milling center | MAZAK(QTN250M) | 2 | φ580*600 | 3 |
| CNC | Newway(NL-634SC) | 1 | φ630*1000 | 5 |
| CNC | FUJI(TN-36) | 2 | φ350*290 | 3 |
| CNC | HAAS SL30 | 1 | φ620*750 | 3 |
| CNC | MAZAK FJV200 | 1 | 560X*410Y*560Z | 3 |
| CNC | LGMAZAK NEXUS160AN-2PC | 1 | 560X*410Y*660Z | 10 |
| CNC | WHEELEL | 2 | 560X*410Y*660Z | 5 |
| Welding | Miller | 1 | | |
———Material list we can deal
Stainless steel :304/1.4307 316/1.4404 321/1.4541 316Ti/1.4571 317L 904L F44 NO6625 UNS718
440A/B/C 431 446 F6a F11 F22 F91
Duplex steel : F51 F60 F53 F55
Aluminum : 6061 6063 7075 5052
———Our career
We have established close cooperation with many famous enterprises at home and abroad
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C Type CVD Ferrofluidic Feedthrough Magnetic Fluid Vacuum Images
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